DocumentCode
2469827
Title
2E-4 Temperature Compensation Method of phi 1mm Ball SAW Gas Sensor Using Harmonics
Author
Sim, Dongyoun ; Bryan, Maxey ; Takeda, Nobuo ; Nakaso, Noritaka ; Iwata, Naoya ; Tsuji, Toshihiro ; Yamanaka, Kazushi
Author_Institution
Ball Semicond. Inc., Allen
fYear
2007
fDate
28-31 Oct. 2007
Firstpage
76
Lastpage
79
Abstract
Newly designed phi 1 mm ball SAW device with a double electrode IDT has a fundamental frequency of 80[MHz], third and fifth harmonics. A difference of the delay time between the fundamental frequency component and a higher harmonic was used to compensate the temperature drift. A temperature coefficient of about 1[ppm/degC ] was obtained after compensation.
Keywords
acoustic wave propagation; error compensation; gas sensors; interdigital transducers; surface acoustic wave sensors; ultrasonic transducers; SAW gas sensor; delay time; double electrode IDT; frequency 80 MHz; fundamental frequency component; surface acoustic wave devices; temperature compensation method; temperature drift; Collimators; Electrodes; Frequency; Gas detectors; Harmonic analysis; Power harmonic filters; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; Virtual reality;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2007. IEEE
Conference_Location
New York, NY
ISSN
1051-0117
Print_ISBN
978-1-4244-1384-3
Electronic_ISBN
1051-0117
Type
conf
DOI
10.1109/ULTSYM.2007.32
Filename
4409605
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