DocumentCode :
2471701
Title :
Fabrication and characterization of horizontal air-slot microdisk resonator
Author :
Lee, Shinyoung ; Eom, Seok Chan ; Chang, Jee Soo ; Shin, Jung H.
Author_Institution :
Dept. of Phys., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea
fYear :
2009
fDate :
9-11 Sept. 2009
Firstpage :
28
Lastpage :
30
Abstract :
Pedestal-type microdisk resonators with SiN disks and SiO2 slots are fabricated. By selective etching, air-slots for maximum light confinement could be obtained. Resonant modes for both oxide- and air slots were measured using tapered fiber coupling.
Keywords :
discs (structures); etching; micro-optics; microcavities; optical fabrication; optical multilayers; silicon compounds; whispering gallery modes; SiN-SiO2-SiN; horizontal air-slot microdisk resonator; light confinement; multilayers; pedestal-type microdisk resonators; resonant modes; selective etching; tapered fiber coupling; whispering gallery modes; Fabrication;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Group IV Photonics, 2009. GFP '09. 6th IEEE International Conference on
Conference_Location :
San Francisco, CA
ISSN :
1949-2081
Print_ISBN :
978-1-4244-4402-1
Electronic_ISBN :
1949-2081
Type :
conf
DOI :
10.1109/GROUP4.2009.5338301
Filename :
5338301
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2471701
بازگشت