• DocumentCode
    2472018
  • Title

    Monitoring Thin-Film Etching Using Surface Acoustic Waves

  • Author

    Joshi, S.G.

  • fYear
    1987
  • fDate
    14-16 Oct. 1987
  • Firstpage
    601
  • Lastpage
    604
  • Keywords
    Acoustic waves; Delay lines; Etching; Monitoring; Oscillators; Plasma applications; Plasma materials processing; Resists; Surface acoustic waves; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE 1987 Ultrasonics Symposium
  • Conference_Location
    Denver, Colorado, USA
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1987.199028
  • Filename
    1535968
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2472018