Title :
Athermal wavelength property of Si-slot ring resonator embedded with benzocyclobutene
Author :
Atsumi, Yuki ; Nishiyama, Nobuhiko ; Enomoto, Haruki ; Inoue, Keita ; Arai, Shigehisa
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
Abstract :
An athermal silicon-slot-waveguide ring resonator embedded with benzocyclobutene (BCB), which is low-k material for electronics, was proposed and demonstrated. The temperature dependence of the drop wavelengths as small as -0.6 pm/K was achieved.
Keywords :
elemental semiconductors; integrated optics; optical resonators; optical waveguides; organic compounds; silicon; thermo-optical effects; athermal silicon-slot-waveguide ring resonator; athermal wavelength property; benzocyclobutene; drop wavelengths; low-k material; silicon-slot ring resonator; Circuits; Large scale integration; Nonlinear optics; Optical filters; Optical refraction; Optical ring resonators; Optical variables control; Optical waveguides; Temperature dependence; Wavelength division multiplexing; Benzocyclobutene; Si photonics; athermal wavelengtrh property; ring resonator; slot waveguide;
Conference_Titel :
Group IV Photonics, 2009. GFP '09. 6th IEEE International Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-4402-1
Electronic_ISBN :
1949-2081
DOI :
10.1109/GROUP4.2009.5338356
