Performance Optimization of MEMS Capacitive Accelerometer

MEMS Accelerometers are widely used as sensing element to measure acceleration, tilt, shock. Accelerometer measures acceleration of a device which is used as an input to some type of control systems and those control systems change their dynamic conditions according to measured acceleration. This paper presents a capacitive accelerometer composed of pure oxide stacking to avoid the initial residual stress when the device is taken out from the substrate providing better thermal stability resulting in more accuracy of device in more harsh conditions. Sensitivity is improved by using full bridge differential capacitive sensing packaged us-ing LTCC technology. Performance analysis of device is done by finite element analysis (FEA) tool Intellisuite® and further optimization is achieved by varying beam length and beam width with pure oxide stacking struc-ture and LTCC packaging.