Title :
Thickness Measurement of Thin Films Using an Improved Laser Probe
Author :
Yang, K.H. ; Zhang, S.Y. ; Lu, Z.N. ; Chen, L.
Keywords :
Laser beams; Optical beams; Optical diffraction; Optical films; Optical interferometry; Optical mixing; Optical sensors; Probes; Thickness measurement; Transistors;
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
DOI :
10.1109/ULTSYM.1987.199140
