DocumentCode
2474656
Title
11E-4 Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators
Author
Jansman, A.B.M. ; Strijbos, R.C. ; Lobeek, J.W. ; Vanhelmont, F.W.M. ; Ruigrok, J.J.M. ; Pensala, T. ; Ylilammi, M.
Author_Institution
NXP Semicond. Res. Eindhoven, Eindhoven
fYear
2007
fDate
28-31 Oct. 2007
Firstpage
1045
Lastpage
1048
Abstract
For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.
Keywords
acoustic dispersion; acoustic resonators; bulk acoustic wave devices; membranes; BAW resonators; bulk acoustic wave resonators; dispersion characteristics; vibrating membrane model; Acoustic devices; Biomembranes; Brain modeling; Dispersion; Electric variables measurement; Frequency; Optical interferometry; Optical resonators; Partial differential equations; Resonance;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2007. IEEE
Conference_Location
New York, NY
ISSN
1051-0117
Print_ISBN
978-1-4244-1384-3
Electronic_ISBN
1051-0117
Type
conf
DOI
10.1109/ULTSYM.2007.264
Filename
4409837
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