Reliability-based characterization of single crystalline silicon micromirrors for space applications

Author

Yoo, Byung-Wook ; Park, Jae-Hyoung ; Jin, Joo-Young ; Park, I.H. ; Kim, Yong-Kweon

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul, South Korea

fYear

2009

fDate

17-20 Aug. 2009

Firstpage

65

Lastpage

66

Abstract

We focus on reliability-based tests of one-axis single crystalline silicon micromirrors and performance in space environments. Reliability testing inhere shows how to deal with fabrication misalignment, charging effect, settling time reduction, shock and vibration in space, stiction in humidity, and reflectivity degradation related to outgassing. The micromirror in the international space station (ISS) actuated successfully under non-gravity condition as on earth.

Keywords

aerospace instrumentation; micromirrors; reflectivity; reliability; silicon; stiction; vibrations; zero gravity experiments; charging effect; fabrication misalignment; humidity; international space station; nongravity condition; one-axis single crystalline silicon micromirrors; reflectivity degradation; reliability-based characterization; settling time reduction; space applications; stiction; vibration; Crystallization; Degradation; Electric shock; Fabrication; Humidity; Micromirrors; Reflectivity; Silicon; Space charge; Testing; international space station; reliability testing; silicon micromirror; space environments;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Conference_Location

Clearwater, FL

Print_ISBN

978-1-4244-2382-8

Electronic_ISBN

978-1-4244-2382-8

Type

conf

DOI

10.1109/OMEMS.2009.5338593

Filename

5338593