Title :
Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive
Author :
Pal, Sagnik ; Xie, Huikai
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
Abstract :
Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays.
Keywords :
micro-optomechanical devices; microactuators; micromirrors; pulse width modulation; PWM; actuation; constant velocity scan range; electrothermal micromirrors; pulse width modulateion; Actuators; Biomedical optical imaging; Electrothermal effects; Micromirrors; Mirrors; Optical interferometry; Pulse width modulation; Resistance heating; Space vector pulse width modulation; Voltage; Electrothermal actuation; MEMS; PWM; bimorph; micromirror; pulse width modulation;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338600
