A mixed-signal analysis tool for MOEMS based on circuit simulator

Author

Takahashi, T. ; Maruyama, S. ; Mita, M. ; Fujita, H. ; Toshiyoshi, H.

Author_Institution

Inst. of Ind. Sci. (IIS), Univ. of Tokyo, Tokyo, Japan

fYear

2009

fDate

17-20 Aug. 2009

Firstpage

154

Lastpage

155

Abstract

We report a newly developed mixed-signal simulation tool for micro optoelectromechanical systems. Multi-physics signals in electrical, mechanical and optical domains are handed as electrical voltage or current in a circuit simulator Qucs, by implementing an equation-defined analytical model into the voltage-controlled current sources. This paper reports an equivalent circuit implementation of the electrostatic torsion mirror scanner.

Keywords

circuit simulation; equivalent circuits; micro-optomechanical devices; micromirrors; MOEMS; circuit simulator Qucs; electrostatic torsion mirror scanner; equation-defined analytical model; equivalent circuit implementation; microoptoelectromechanical systems; mixed-signal analysis tool; voltage-controlled current sources; Aerospace industry; Analytical models; Circuit simulation; Electrostatics; Equations; Equivalent circuits; Mirrors; Predictive models; Ray tracing; Voltage; Equivalent Circuit Model; Mixed-signal Analysis; Simulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Conference_Location

Clearwater, FL

Print_ISBN

978-1-4244-2382-8

Electronic_ISBN

978-1-4244-2382-8

Type

conf

DOI

10.1109/OMEMS.2009.5338613

Filename

5338613