Title :
Demonstration of a monolithic dielectric microstructured surface with a reflectivity of 99.8%
Author :
Brückner, Frank ; Clausnitzer, Tina ; Käsebier, Thomas ; Kley, Ernst-Bernhard ; Tünnermann, Andreas
Author_Institution :
Inst. fur Angewandte Phys., Friedrich-Schiller-Univ. Jena, Jena, Germany
Abstract :
We present first experimental data on a highly reflective monolithic dielectric microstructured surface that has been proposed recently to open a route to monolithic (micro-) opto-mechanical systems such as high precision interferometric experiments.
Keywords :
micro-optomechanical devices; micromirrors; reflectivity; interferometry; microstructured surface; monolithic micro-opto-mechanical systems; reflectivity; Dielectrics; Gratings; Optical interferometry; Optical materials; Optical noise; Optical sensors; Optical surface waves; Optical waveguides; Reflectivity; Resonance;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338617
