• DocumentCode
    2476797
  • Title

    P1I-3 FBAR Multi-Layer Resonator for Remote Identification

  • Author

    Cherednick, V.I.

  • Author_Institution
    State Univ. Nizhny, Novgorod
  • fYear
    2007
  • fDate
    28-31 Oct. 2007
  • Firstpage
    1441
  • Lastpage
    1443
  • Abstract
    Frequency spectra of multi-layer Al-AlN FBAR resonator are calculated. It is shown, that plurality of frequency spectra can be obtained by various combinations of quantities of layers and their thickness. Each spectrum is individual and can be used for remote identification similar to SAW tags.
  • Keywords
    acoustic resonators; bulk acoustic wave devices; identification; surface acoustic wave devices; FBAR multilayer resonator; bulk acoustic wave resonator; frequency spectra plurality; remote identification; Acoustic waves; Chemicals; Dielectric substrates; Film bulk acoustic resonators; Frequency; Partial differential equations; Piezoelectric devices; Radiofrequency identification; Surface acoustic wave devices; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2007. IEEE
  • Conference_Location
    New York, NY
  • ISSN
    1051-0117
  • Print_ISBN
    978-1-4244-1384-3
  • Electronic_ISBN
    1051-0117
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2007.362
  • Filename
    4409935