DocumentCode
2476797
Title
P1I-3 FBAR Multi-Layer Resonator for Remote Identification
Author
Cherednick, V.I.
Author_Institution
State Univ. Nizhny, Novgorod
fYear
2007
fDate
28-31 Oct. 2007
Firstpage
1441
Lastpage
1443
Abstract
Frequency spectra of multi-layer Al-AlN FBAR resonator are calculated. It is shown, that plurality of frequency spectra can be obtained by various combinations of quantities of layers and their thickness. Each spectrum is individual and can be used for remote identification similar to SAW tags.
Keywords
acoustic resonators; bulk acoustic wave devices; identification; surface acoustic wave devices; FBAR multilayer resonator; bulk acoustic wave resonator; frequency spectra plurality; remote identification; Acoustic waves; Chemicals; Dielectric substrates; Film bulk acoustic resonators; Frequency; Partial differential equations; Piezoelectric devices; Radiofrequency identification; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2007. IEEE
Conference_Location
New York, NY
ISSN
1051-0117
Print_ISBN
978-1-4244-1384-3
Electronic_ISBN
1051-0117
Type
conf
DOI
10.1109/ULTSYM.2007.362
Filename
4409935
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