P1J-4 Evaluation of Small Ultrasonic Probe Using Lead Zirconate Titanate Film Deposited by Hydrothermal Method

Recently, our laboratory has explored the possibility of using lead zirconate titanate [PZT] polycrystalline film deposited hydrothermally on titanium substrate to fabricate a small actuator and ultrasound sensor. Hydrothermally deposited PZT polycrystalline films have piezoelectricity without a poling process, and it is easy to deposit PZT polycrystalline films on substrates that are tiny or complexly shaped. We confirmed that hydrothermally synthesized PZT polycrystalline films have wideband frequency characteristics with sensitivities in the megahertz band. It is thought that miniature ultrasound probes with wide- frequency band characteristics can be fabricated using hydrothermally synthesized PZT polycrystalline films. In our last report we assessed methods to produce a miniature ultrasound probe and transceiver characteristics. Here, the reception and transmission directivities of such a probe were measured at 5, 10, 15, and 20 MHz. The results showed that, except at 5 MHz, the theoretical and experimental values agreed. The difference at 5 MHz is attributed to the effect of the resonance frequency of the diameter direction.