Title :
Wireless driving of micromirror using electromagnetic induction
Author :
Sasaki, Minoru ; Ohnishi, Narimune ; Kumagai, Shinya ; Hane, Kazuhiro
Author_Institution :
Dept. of Adv. Sci. & Technol., Toyota Technol. Inst., Nagoya, Japan
Abstract :
The wireless driving of the micromirror is investigated using the electromagnetic induction. Taking advantages of the low-voltage driving of the micromirror and the use of electrical and mechanical resonances, the mirror rotation angle of 0.6deg at the separation gap of 24 mm is obtained being excited by 1 mT field at the relatively low Q conditions.
Keywords :
electromagnetic actuators; electromagnetic induction; micromirrors; distance 24 mm; electrical resonance; electromagnetic induction; magnetic flux density 1 mT; mechanical resonance; micromirror; mirror rotation angle; wireless driving; Electromagnetic induction; Micromirrors; Electromagnetic Induction; Electrostatic driving; Micromirror; Wireless driving;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338629
