DocumentCode
2480583
Title
Vibration control of a turbomolecular vacuum pump using piezoelectric actuators
Author
Piroddi, Luigi ; Leva, Alberto ; Casaro, Fausto
Author_Institution
Dipt. di Elettronica e Informazione, Politecnico di Milano, Milan
fYear
2006
fDate
13-15 Dec. 2006
Firstpage
6555
Lastpage
6560
Abstract
This manuscript presents an experimental activity concerning the active vibration control of a turbomolecular vacuum pump. Based on extensive tests, performed with the ad hoc laboratory setup described in this work, some possible alternatives are devised for the design of a digital active control system. Both simulations and (preliminary) experimental results are reported
Keywords
control system synthesis; digital control; piezoelectric actuators; vacuum pumps; vibration control; active vibration control; digital active control system design; piezoelectric actuators; turbomolecular vacuum pump; Control systems; Damping; Frequency; Instruments; Laboratories; Piezoelectric actuators; Robust stability; Sampling methods; Vacuum systems; Vibration control;
fLanguage
English
Publisher
ieee
Conference_Titel
Decision and Control, 2006 45th IEEE Conference on
Conference_Location
San Diego, CA
Print_ISBN
1-4244-0171-2
Type
conf
DOI
10.1109/CDC.2006.377707
Filename
4177857
Link To Document