• DocumentCode
    2480583
  • Title

    Vibration control of a turbomolecular vacuum pump using piezoelectric actuators

  • Author

    Piroddi, Luigi ; Leva, Alberto ; Casaro, Fausto

  • Author_Institution
    Dipt. di Elettronica e Informazione, Politecnico di Milano, Milan
  • fYear
    2006
  • fDate
    13-15 Dec. 2006
  • Firstpage
    6555
  • Lastpage
    6560
  • Abstract
    This manuscript presents an experimental activity concerning the active vibration control of a turbomolecular vacuum pump. Based on extensive tests, performed with the ad hoc laboratory setup described in this work, some possible alternatives are devised for the design of a digital active control system. Both simulations and (preliminary) experimental results are reported
  • Keywords
    control system synthesis; digital control; piezoelectric actuators; vacuum pumps; vibration control; active vibration control; digital active control system design; piezoelectric actuators; turbomolecular vacuum pump; Control systems; Damping; Frequency; Instruments; Laboratories; Piezoelectric actuators; Robust stability; Sampling methods; Vacuum systems; Vibration control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Decision and Control, 2006 45th IEEE Conference on
  • Conference_Location
    San Diego, CA
  • Print_ISBN
    1-4244-0171-2
  • Type

    conf

  • DOI
    10.1109/CDC.2006.377707
  • Filename
    4177857