Formaldehyde Gas Sensor Utilizing Self-heating NiO Thin Film and Pt Electrodes

This study has demonstrated a novel self-heating formaldehyde gas sensor based on a thin NiO sensing layer. Pt IDEs are formed on the sensing layer to measure the conductivity changes caused by formaldehyde oxidation at the oxide surface. Furthermore, the refined grain size of the oxide sensing layer significantly increases the sensitivity of the gas sensor, improves its detection limit capability. The microfabricated formaldehyde gas sensor presented in this study is suitable not only for industrial process monitoring, but also for the detection of formaldehyde concentrations in buildings in order to safeguard human health.