DocumentCode
2497508
Title
A Micro-Processor Assisted Baseplating Apparatus with Improved Plateback Distribution
Author
Ang, Dick
fYear
1980
fDate
1980
Firstpage
41
Lastpage
45
Keywords
Conductors; Crystals; Electrodes; Fixtures; Frequency; Manufacturing industries; Metallization; Semiconductor device manufacture; Sputtering; Vacuum systems;
fLanguage
English
Publisher
ieee
Conference_Titel
34th Annual Symposium on Frequency Control. 1980
Type
conf
DOI
10.1109/FREQ.1980.200382
Filename
1537322
Link To Document