DocumentCode
2497702
Title
A comparison among different technological processes for the fabrication of polysilicon-based thermoelectric transducers
Author
Mancarella, Fulvio ; Roncaglia, Alberto ; Tamarri, Fabrizio ; Elmi, Ivan ; Cardinali, Gian Carlo ; Severi, Maurizio
Author_Institution
Nat. Res. Council of Italy, Bologna
fYear
2006
fDate
22-25 Oct. 2006
Firstpage
1235
Lastpage
1238
Abstract
We propose a comparison among different solutions for realizing polysilicon thermoelectric transducers, with five different types of thermoelements based on Al/polysilicon and two level polysilicon design, using different doping (of p and n-type) for the poly layers. The device performances are evaluated on a test geometry with electrical measurements and the performance obtained with the various solutions are compared.
Keywords
electric variables measurement; silicon; thermoelectric devices; transducers; Si; electrical measurements; electrical test; polysilicon-based thermoelectric transducers; test geometry; thermoelements; Aluminum; Biomembranes; Doping; Fabrication; Performance evaluation; Platinum; Thermal conductivity; Thermal sensors; Thermoelectricity; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2006. 5th IEEE Conference on
Conference_Location
Daegu
ISSN
1930-0395
Print_ISBN
1-4244-0375-8
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2007.355851
Filename
4178846
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