Failure analysis of the electrostatic parallel-plate micro-actuator

Non-parallel electrode plates resulted in further oblique of the upper electrode until it reached another equilibrium position. The relationship between the obliquity beta in the final equilibrium situation and the initial obliquity a is constructed. Efficient failure and analysis are becoming essential in electrostatic parallel-plate especially for high reliability and safety critical applications. The simulation was carried in the CoventorWare. The impact of the non-parallel capacitor for reliability was studied. The corresponding capacitance and pullin voltage were compared between the prototype and the nonparallel model. The displacement of the movable structure and the corresponding stress under load were established. The impact of load on resonant frequency was studied.