• DocumentCode
    2497930
  • Title

    Wine-Glass Mode Micro-Mechanical Resonator

  • Author

    Ikoma, Kazuya ; Okazaki, Masanobu ; Esahi, Masayoshi

  • Author_Institution
    Nihon Dempa Kogyo Co.Ltd., Sayama
  • fYear
    2006
  • fDate
    22-25 Oct. 2006
  • Firstpage
    1289
  • Lastpage
    1292
  • Abstract
    This paper reports on the fabrication and measurement of a wine-glass mode micro-mechanical resonator by using silicon-on-insulator (SOI) wafer. We used single crystal Si for disk resonator and poly-Si for electrodes. The thickness and the radius of the disk resonator are 10 mum and 20 mum, respectively. Our resonator shows a resonant frequency of f0=88.5 MHz, a motional resistance of Rx=8.3 MOmega and a quality factor of 5000 in air.
  • Keywords
    micromechanical resonators; silicon-on-insulator; disk resonator; frequency 88.5 MHz; resistance 8.3 Mohm; silicon-on-insulator wafer; single crystal Si; wine-glass mode micromechanical resonator; Drives; Electrodes; Electrostatics; Radio frequency; Radiofrequency microelectromechanical systems; Resonance; Resonant frequency; Resonator filters; Shape; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2006. 5th IEEE Conference on
  • Conference_Location
    Daegu
  • ISSN
    1930-0395
  • Print_ISBN
    1-4244-0375-8
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2007.355865
  • Filename
    4178860
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2497930