DocumentCode
2498640
Title
Design of high quality thermally diffused p+n and n+p InP structures with the help of electrochemical studies
Author
Faur, M. ; Faur, M. ; Ghalla-Goradia, M. ; Vargas-Aburto, C.
Author_Institution
Electr. Eng. Dept., Cleveland State Univ., OH, USA
fYear
1993
fDate
19-22 Apr 1993
Firstpage
615
Lastpage
619
Abstract
The authors report on the use of electrochemical (EC) techniques for characterization and step-by-step optimization of n+p and p+n InP structures fabricated by thermal diffusion, for making high efficiency radiation resistant InP solar cells. The emitter layer and the junction proximity of the base are characterized as functions of: (a) various surface preparation procedures; (b) diffusion cap; (c) diffusion source; and (d) diffusion conditions consisting of diffusion temperature and time, amount of source material and added phosphorus, and temperature difference between the source and substrates. The EC characterization of the emitter layer provides: (a) thickness of front damaged layers; (b) density of surface and deep dislocations, and precipitates; (c) net majority carrier concentration depth profiles; and (d) surface and deep trap levels. The EC characterization was done both before and after irradiating the structure with high energy electrons and protons
Keywords
III-V semiconductors; carrier density; deep levels; dislocation density; electrochemical analysis; indium compounds; p-n junctions; proton effects; semiconductor doping; solar cells; thermal diffusion; InP; deep dislocations; deep trap levels; diffusion cap; diffusion source; diffusion temperature; electrochemical studies; emitter layer; high efficiency radiation resistant InP solar cells; high energy electrons; junction proximity; majority carrier concentration depth profiles; n+p InP structures; p+n InP structures; precipitates; proton irradiation; step-by-step optimization; surface dislocation density; surface preparation procedures; surface trap levels; thermal diffusion; Doping; Etching; Indium phosphide; Photovoltaic cells; Photovoltaic systems; Substrates; Temperature; Thermal engineering; Thermal resistance; Zinc;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on
Conference_Location
Paris
Print_ISBN
0-7803-0993-6
Type
conf
DOI
10.1109/ICIPRM.1993.380620
Filename
380620
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