Title :
A Micromachined Electrostatic Field Sensor with Vertical Thermal Actuator
Author :
Ye, Chao ; Peng, Chunrong ; Chen, Xianxiang ; Xia, Shanhong
Author_Institution :
Chinese Acad. of Sci., Beijing
Abstract :
This paper presents a micromachined electrostatic field sensor with U-shaped vertical thermal actuators. The sensor is fabricated with a standard surface micromachining process and the area of the sensor is less than 2.5 mm times 2.5 mm. We tested the sensor with low driving voltages of +0.6 V, and a high resolution of 200 V/m has been achieved by the sensor.
Keywords :
electric sensing devices; electrostatic actuators; micromachining; U-shaped vertical thermal actuators; micromachined electrostatic field sensor; surface micromachining process; Ceramics; Chaos; Circuit testing; Electrodes; Electrostatic actuators; Fabrication; Low voltage; Micromachining; Thermal sensors; Transducers;
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.355898
