DocumentCode :
2498783
Title :
High-Sensitivity Bi-Directional Flow Sensor Based on Biological Inspiration of Animal Haircell Sensors
Author :
Tucker, Craig ; Chen, Nannan ; Engel, Jonathan ; Yang, Yingchen ; Pandya, Saunvit ; Liu, Chang
Author_Institution :
Univ. of Illinois Urbana-Champaign, Urbana
fYear :
2006
fDate :
22-25 Oct. 2006
Firstpage :
1440
Lastpage :
1442
Abstract :
Artificial haircell (AHC) sensor is presented for highly sensitive flow-field measurements. Design considerations and MEMS process flows are given. Oscillating flow field measurements show sensitivity down to 0.6 mm/s flow rates, steady state flow fields detected down to 0.1 mm/s.
Keywords :
flow sensors; microsensors; AHC sensor; MEMS process; animal haircell sensors; biological inspiration; high-sensitivity bi-directional flow sensor; oscillating flow field measurements; Animals; Bidirectional control; Biosensors; Etching; Fabrication; Hair; Piezoresistance; Resistors; Sensor phenomena and characterization; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
ISSN :
1930-0395
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2007.355904
Filename :
4178899
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2498783
بازگشت