Improved Microcantilever Geometry for Bio and Chemical Sensing

Author

Sheeparamatti, B.G. ; Kadadevarmath, J.S. ; Bashetti, R.M.

Author_Institution

Dept. of E & CE, Basaveshwar Eng. Coll., Bagalkot, India

fYear

2014

fDate

9-11 Jan. 2014

Firstpage

341

Lastpage

345

Abstract

Micro cantilever based biochemical sensors have been around for a quite some time. Though they are limited to simple rectangular type of sensing surface, they are quite capable in detecting agents of interest. However one can improve their performance by enhancing their mass sensitivity. In this paper, a numerical study is performed to assess the influence of micro cantilever geometry on its resonance frequency. The change in resonance frequency can be used to detect the added mass. Thus one can use these results to improve the performance of micro cantilever based sensors. ANSYS/Multi physics and COMSOL/Multi physics analysis for frequency is carried out.

Keywords

biosensors; cantilevers; chemical sensors; geometry; micromechanical devices; ANSYS; COMSOL; improved microcantilever geometry; microcantilever based biochemical sensors; resonance frequency; Biological system modeling; Biosensors; Finite element analysis; Frequency measurement; Geometry; Resonant frequency; biosensors; chemical sensors; microcantilever geometry; microcantilevers;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Systems, Signal Processing and Computing Technologies (ICESC), 2014 International Conference on

Conference_Location

Nagpur

Type

conf

DOI

10.1109/ICESC.2014.94

Filename

6745400