Title :
Surface Wave Resonators on Silicon
Author :
Martin, S.J. ; Gunshor, R.L. ; Miller, T.J. ; Datta, S. ; Pierret, R.F. ; Melloch, M.R.
Keywords :
Optical attenuators; Optical films; Optical resonators; Optical surface waves; Propagation losses; Silicon; Substrates; Surface acoustic waves; Surface waves; Zinc oxide;
Conference_Titel :
37th Annual Symposium on Frequency Control. 1983
Conference_Location :
Philadelphia, Pennsylvania, USA
DOI :
10.1109/FREQ.1983.200702
