Title :
Experimental Study and Numerical Simulation of Quartz Crystal Etched Figures
Author :
Tellier, C.R. ; Vialle, N. ; Vaterkowski, J.L.
Keywords :
Chemicals; Diffusion processes; Equations; Etching; Hafnium; Lattices; Numerical models; Numerical simulation; Shape; Tellurium;
Conference_Titel :
40th Annual Symposium on Frequency Control. 1986
Conference_Location :
Philadelphia, Pennsylvania, USA
DOI :
10.1109/FREQ.1986.200925
