Title :
Technology CAD: technology modeling, device design and simulation
Author :
Saha, Samar ; Gadepally, Bhaskar
Author_Institution :
Silicon Storage Technol. Inc., Sunnyvale, CA, USA
Abstract :
Technology CAD that accurately predicts the process and device characteristics of anticipated wafer fabrication technology is indispensable for future IC fabrication and device development. This tutorial provides a detailed survey of the challenging issues of TCAD in technology and device design, insight into the foundation of TCAD tools, calibration of physical models for predictive bulk-process and device simulations, and practical examples form the industrial usage of TCAD in research and development.
Keywords :
circuit simulation; integrated circuit design; research and development; technology CAD (electronics); IC fabrication; circuit device design; circuit simulations; research and development; technology CAD; wafer fabrication; CMOS technology; Calibration; Design automation; Fabrication; Nanoscale devices; Numerical models; Predictive models; Quantum mechanics; Semiconductor process modeling; Silicon;
Conference_Titel :
VLSI Design, 2004. Proceedings. 17th International Conference on
Print_ISBN :
0-7695-2072-3
DOI :
10.1109/ICVD.2004.1260890
