DocumentCode :
2509262
Title :
Nanomechanical Properties of CN/sub x/ Overcoats with Different Deposition Bias and Multiple-Layer Properties of DLC Films on Si
Author :
Hsiao, Ruey-Chang ; Bogy, David B. ; Singh, Chaman
Author_Institution :
University of California at Berkeley
fYear :
1998
fDate :
6-9 Jan. 1998
Firstpage :
252
Lastpage :
252
Keywords :
Coatings; Composite materials; Fabrication; Lubricants; Magnetic films; Magnetic materials; Material storage; Protection; Semiconductor films; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
Type :
conf
DOI :
10.1109/INTMAG.1998.742324
Filename :
742324
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2509262
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