DocumentCode
2510185
Title
On the control of scanning tunnelling microscopes
Author
Banning, R. ; Sholte ; Holman, A.E.
Author_Institution
Fac. of Appl. Phys., Delft Univ. of Technol., Netherlands
fYear
1994
fDate
24-26 Aug 1994
Firstpage
1475
Abstract
The scanning tunnelling microscope (STM) can be used either for qualitative microscopy or for lithography. Furthermore, this microscope is a high precision instrument sensitive to disturbances originating from sound waves, vibrations and temperature variations. The quality of mechanical design is paramount for the scanning tunnelling microscopy technology. It is however not only the quality of mechanical design which defines the STM´s operational reliability, it is also the quality of the STM´s control system, as practical experience indicates. In this paper, attention is focused on improving the STM´s control system
Keywords
control systems; hierarchical systems; microscopy; nonlinear control systems; optimal control; scanning tunnelling microscopy; control system; hierarchical control; model based control; nonlinear control; optimal control; scanning tunnelling microscopes; Control systems; Hierarchical systems; Microscopy; Nonlinear systems; Optimal control;
fLanguage
English
Publisher
ieee
Conference_Titel
Control Applications, 1994., Proceedings of the Third IEEE Conference on
Conference_Location
Glasgow
Print_ISBN
0-7803-1872-2
Type
conf
DOI
10.1109/CCA.1994.381298
Filename
381298
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