DocumentCode
2513637
Title
Properties of Lithium Niobate Thin Polycrystalline Films Deposited on Silicon Substrates
Author
Cholapranee, T. ; Fabiny, L.
fYear
1986
fDate
8-11 June 1986
Firstpage
585
Lastpage
588
Keywords
Aluminum; Lithium niobate; Powders; Semiconductor films; Semiconductor thin films; Silicon; Sputtering; Substrates; Temperature; X-ray diffraction;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics. 1986 Sixth IEEE International Symposium on
Conference_Location
Bethlehem, PA, USA
Type
conf
DOI
10.1109/ISAF.1986.201211
Filename
1538151
Link To Document