• DocumentCode
    2513637
  • Title

    Properties of Lithium Niobate Thin Polycrystalline Films Deposited on Silicon Substrates

  • Author

    Cholapranee, T. ; Fabiny, L.

  • fYear
    1986
  • fDate
    8-11 June 1986
  • Firstpage
    585
  • Lastpage
    588
  • Keywords
    Aluminum; Lithium niobate; Powders; Semiconductor films; Semiconductor thin films; Silicon; Sputtering; Substrates; Temperature; X-ray diffraction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics. 1986 Sixth IEEE International Symposium on
  • Conference_Location
    Bethlehem, PA, USA
  • Type

    conf

  • DOI
    10.1109/ISAF.1986.201211
  • Filename
    1538151