DocumentCode
2513686
Title
Dielectric Properties of RF Sputered Bismuth Titanate Thin Films
Author
Ghosh, P.K. ; Bhalla, A.S. ; Cross, L.E.
fYear
1986
fDate
8-11 June 1986
Firstpage
596
Lastpage
598
Keywords
Bismuth; Dielectric losses; Dielectric substrates; Dielectric thin films; Glass; Optical films; Plasma temperature; Radio frequency; Sputtering; Titanium compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics. 1986 Sixth IEEE International Symposium on
Conference_Location
Bethlehem, PA, USA
Type
conf
DOI
10.1109/ISAF.1986.201214
Filename
1538154
Link To Document