A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

Author

Samuelson, S.R. ; Huikai Xie

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA

Volume

23

Issue

1

fYear

2014

fDate

Feb. 2014

Firstpage

39

Lastpage

49

Abstract

A large displacement piston motion micromirror is designed, fabricated, and tested with device features tuned to applications requiring ultralow tilt. The fabricated MEMS mirror is based on electrothermal actuation and has a footprint of 1.9 mm × 1.9 mm with a mirror aperture of 1 mm. The application optimized device holds key features of ultralow maximum tilt of 0.25 ° and a strongly linear motion of 90 μm achievable at only 1.2 V. This device is further characterized in an interferometric system to determine the piston mode and the accurate piston displacement as a function of voltage, power, and frequency.

Keywords

actuators; light interferometry; micro-optomechanical devices; micromirrors; optical arrays; optical control; optical design techniques; optical fabrication; pistons; electrothermal actuation; electrothermal ladder actuator arrays; interferometric system; large piston displacement MEMS mirror; size 1 mm; size 1.9 mm; ultralow tilt applications; voltage 1.2 V; Actuators; Finite element analysis; Heating; Micromechanical devices; Micromirrors; Pistons; Bimorph; microelectromechanical systems (MEMS); piston; vertical displacement;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2013.2290994

Filename

6676786