Title :
Deformable micro-mirror for adaptive optics composed of piezoelectric PZT thin films
Author :
Kotera, Hidetoshi ; Kanno, Isaku ; Inoue, Takafumi ; Suzuki, Takaaki
Author_Institution :
Micro Eng., Kyoto Univ.
Abstract :
In this paper we present the piezoelectric-driven deformable micro-mirror for optical wavefront correction. The mirror membrane was fabricated on diaphragm structure composed of piezoelectric PZT thin films on Si substrate. The application of voltage induced large deflection of the surface of the diaphragm
Keywords :
adaptive optics; diaphragms; micromirrors; piezoelectric thin films; silicon; PZT; PbZrO3TiO3; Si; Si substrate; adaptive optics; diaphragm structure; mirror membrane fabrication; optical wavefront correction; piezoelectric PZT thin films; piezoelectric-driven deformable micromirror; voltage induced large deflection; Adaptive optics; Biomembranes; Electrodes; Mirrors; Optical films; Piezoelectric films; Retina; Semiconductor thin films; Sputtering; Voltage;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540061
