Title :
Optical actuation of mems micro-gears through radiation pressure
Author :
Gauthier, R.C. ; Tait, R.N.
Author_Institution :
Dept. of Electron., Carleton Univ., Ottawa, Ont.
Abstract :
The optical processes involved in laser trapping and optical manipulation are explored as a means of actuating micron-sized gear structures. It is shown that laser trapping can be used to suspend in 3-D polyimide gears and set them into rotation. Subsequently we present the light actuation of micron-sized gear structures fabricated with a polysilicon surface micro-machining technique
Keywords :
actuators; laser beam machining; micromachining; micromechanical devices; optical fabrication; radiation pressure; 3-D polyimide gears; MEMS; fabrication; laser trapping; light actuation; micro-gears; optical actuation; optical manipulation; polysilicon surface micro-machining; radiation pressure; Charge carrier processes; Dielectric substrates; Electron traps; Gears; Laser beams; Micromechanical devices; Optical beams; Polyimides; Power lasers; Torque;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540076
