Title :
A reconfigurable add-drop filter using mems-actuated microdisk resonator
Author :
Lee, Ming-Chang M. ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA
Abstract :
A novel vertically coupled tunable microdisk resonator with integrated MEMS tunable optical couplers is demonstrated. A reconfigurable add-drop filter based on this device shows an extinction ratio of 20 dB
Keywords :
integrated optics; micro-optics; micromechanical resonators; multiplexing equipment; optical communication equipment; optical couplers; optical filters; optical resonators; optical tuning; wavelength division multiplexing; MEMS-actuated microdisk resonator; extinction ratio; integrated MEMS tunable optical couplers; reconfigurable add-drop filter; vertically coupled tunable microdisk resonator; wavelength-division-multiplexing; Actuators; Coupling circuits; Etching; Optical filters; Optical resonators; Optical sensors; Optical waveguides; Resonator filters; Silicon; Waveguide discontinuities;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540080