DocumentCode
2518293
Title
Roll-to-roll manufacturing technologies for flexible MEMS applications
Author
Kololuoma, Terho ; Tuomikoski, Markus ; Haring, Timi ; Kopola, Harri
Author_Institution
VTT Electron., Optoelectron., Oulu
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
87
Lastpage
88
Abstract
Roll-to-roll fabrication of electrical and optical structures and functional elements on web will be described. Based on the realized components, the potential of the printing techniques for volume-scale MEMS fabrication will be introduced
Keywords
manufacturing processes; micro-optics; optical fabrication; optoelectronic devices; printing; electrical structures; optical structures; printing techniques; roll-to-roll manufacturing technologies; volume-scale MEMS fabrication; Flexible manufacturing systems; Ink; Micromechanical devices; Optical device fabrication; Optical devices; Optical films; Optical sensors; Packaging; Printing; Production facilities;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540090
Filename
1540090
Link To Document