DocumentCode
2518596
Title
Optical MEMS for advanced spectrometers
Author
Schenk, Harald ; Gruger, H. ; Zimmer, Fabian ; Scherf, Werner ; Kenda, Andreas
Author_Institution
Fraunhofer Inst. for Photonic Microsyst., Villach
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
117
Lastpage
118
Abstract
Optical MEMS based spectrometers capable to perform time resolved measurements from VIS to NIR are presented. They are based on high frequency scanning gratings with V-groove-structure and translational mirrors for Fourier-transform-spectrometers, respectively
Keywords
Fourier transform spectrometers; diffraction gratings; infrared spectrometers; micromirrors; visible spectrometers; Fourier transform spectrometers; NIR; V-groove-structure; VIS; high frequency scanning gratings; optical MEMS; time resolved measurements; translational mirrors; Diffraction gratings; Laser beams; Micromechanical devices; Mirrors; Optical interferometry; Optical modulation; Optical sensors; Spectroscopy; Springs; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540106
Filename
1540106
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