Title :
Tunable, membrane-based, pneumatic micro-mirrors
Author :
Werber, Armin ; Zappe, Hans
Author_Institution :
Lab. for Micro-opt., Freiburg Univ.
Abstract :
A novel design of tunable, membrane-based micro-mirrors is presented. The micro-mirror is actuated by pneumatic pressure which provides large deflection and a large range of angle from -10deg to 70deg, relative to the substrate surface
Keywords :
micromirrors; optical design techniques; optical fabrication; optical tuning; pneumatic actuators; membrane-based micro-mirrors; pneumatic micro-mirrors; pneumatic pressure; substrate surface; Biomembranes; Etching; Fasteners; Glass; Laboratories; Mirrors; Resists; Seals; Shape; Silicon;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540115
