Title :
Patterned gas absorbing films for assuring long-term reliability and improving performances of mems and omems
Author :
Longoni, G. ; Moraja, M. ; Amiotti, M.
Author_Institution :
SAES Getters S.p.A., Lainate
Abstract :
Microsensor packaging is one of the most important and challenging technology areas. Many microelectro-mechanical systems (MEMS) and optical MEMS (OMEMS) need to be protected from outside environment stresses: therefore the package must provide an interior environment compatible with the device operation, performances, reliability and lifetime. In addition some MEMS need a specific gas or pressure environment within the package to operate as specified: in particular, OMEMS should be protected against moisture related failures
Keywords :
micro-optics; microsensors; optical films; optical materials; OMEMS; long-term reliability; microelectro-mechanical systems; microsensor packaging; optical MEMS; patterned gas absorbing films; pressure environment; Chemical technology; Filling; Gettering; Glass; Hermetic seals; Micromechanical devices; Moisture; Packaging; Semiconductor films; Stability;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540119
