Title :
MEMS tunable fabry-perot optical filter
Author :
Ramam, A. ; Chowdhury, Kaushik ; Mithilesh, S. ; Vicknesh, S.
Author_Institution :
Inst. of Mater. Res. & Eng., Singapore
Abstract :
Fabry-Perot (FP) optical filter is an interface reflection mode device selecting only the resonance wavelength and ignoring others within the mirror stop-band. The transmitted wavelength can be tuned by varying the optical path length of the FP cavity. We investigate the wavelength tuning limits that can be obtained by using MEMS concept
Keywords :
micromirrors; optical filters; optical tuning; MEMS tunable Fabry-Perot optical filter; highly reflective Bragg mirrors; optical path length; reflection mode device; wavelength tuning limits; Air gaps; Biomembranes; Distributed Bragg reflectors; Fabry-Perot; Indium phosphide; Laser tuning; Micromechanical devices; Mirrors; Optical filters; Tunable circuits and devices;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540126
