• DocumentCode
    2523903
  • Title

    Measurement of optical constants of CVD-diamond for short-wavelength far-infrared region

  • Author

    Nakayama, K. ; Tazawa, H. ; Okajima, S. ; Kawahata, K. ; Tanaka, K. ; Tokuzawa, T. ; Ito, Y.

  • Author_Institution
    Coll. of Eng., Chubu Univ., Aichi, Japan
  • fYear
    2002
  • fDate
    26-26 Sept. 2002
  • Firstpage
    163
  • Lastpage
    164
  • Abstract
    We are developing a diagnostic system using short-wavelength far-infrared lasers (40-70 /spl mu/m in wavelength) for high density and large volume plasmas. In the wavelength region, a CVD-diamond is the excellent materials for optical windows of the laser and the plasma vessel and beam splitters of a multi-channel interferometer. Using our FIR laser system, the optical constants (refractive index n, absorption coefficient /spl alpha/ and transmissivity T) of the diamond etalon have been measured precisely for 47-, 57- and 71-/spl mu/m in wavelength. The result for 57.1511 /spl mu/m light is n=2.383(0)/spl plusmn/0.001, /spl alpha/=0.32/spl plusmn/0.02 cm/sup -1/ and T=96/spl plusmn/1% (at 1.023 mm in thickness).
  • Keywords
    CVD coatings; absorption coefficients; diamond; light interferometry; light transmission; optical materials; optical windows; plasma density; plasma diagnostics; plasma light propagation; refractive index; submillimetre wave lasers; 1.023 mm; 40 to 71 micron; C; CVD-diamond; FIR laser system; absorption coefficient; beam splitters; diagnostic system; diamond etalon; high density large volume plasmas; multichannel interferometer; optical constants; optical windows; plasma vessel; refractive index; short-wavelength far-infrared region; transmissivity; Optical interferometry; Optical materials; Optical refraction; Optical variables control; Plasma density; Plasma diagnostics; Plasma materials processing; Plasma measurements; Plasma waves; Wavelength measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Infrared and Millimeter Waves, 2002. Conference Digest. Twenty Seventh International Conference on
  • Conference_Location
    San Diego, CA, USA
  • Print_ISBN
    0-7803-7423-1
  • Type

    conf

  • DOI
    10.1109/ICIMW.2002.1076135
  • Filename
    1076135