Impact-actuated linear microvibromotor for micro-optical systems on silicon

Electrostatic actuation has received much attention recently for its potential application in microelectromechanical systems. However, in order to generate the forces needed in many applications, very high voltages (>100 V) are often required. Actuators based on impact have been shown to be a feasible alternative. With impact, a very large force of short duration can be delivered to move a microelement. We describe a surface-micromachined linear-motion microvibromotor to perform this function. The microvibromotor offers: large range of motion, high velocity and precise positioning. Our initial application is to position optical elements, such as mirrors or diffraction gratings, in a micro-optical system on silicon.<>