Title :
A performance analysis system for MEMS using automated imaging methods
Author :
Lavigne, Glenn F. ; Miller, Sam L.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
The ability to make in-situ performance measurements of MEMS operating at high speeds has been demonstrated using a new image analysis system. Significant improvements in performance and reliability have directly resulted from the use of this system
Keywords :
automatic test equipment; microactuators; micromechanical devices; microsensors; semiconductor device testing; video signal processing; MEMS; automated imaging methods; in-situ performance measurements; lateral clamping; microengine; performance analysis system; reliability; video images; waveform generators; Circuit testing; Drives; Image analysis; Lighting; Microelectromechanical devices; Micromechanical devices; Mirrors; Performance analysis; System testing; Tracking;
Conference_Titel :
Test Conference, 1998. Proceedings., International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-5093-6
DOI :
10.1109/TEST.1998.743184
