Title :
LED integrated miniaturized polymer MEMS display
Author :
Gokdel, Y. Daghan ; Sarioglu, Baykal ; Yalcinkaya, Arda D.
Author_Institution :
Dept. of Electr. & Electron. Eng., Bogazici Univ., Istanbul
fDate :
June 22 2008-April 25 2008
Abstract :
This study presents the process development and first experimental results of LED integrated polymer microelectromechanical systems (MEMS) for two-dimensional displays. Proposed integrated system is very cheap due to the fabrication simplicity and the choice of polymer material as the structural layer, and it is a strong candidate to show similar performance when compared with the existing flat panel displays. A process technology that enables the integration of the LED dies and the PCB-based MEMS structure is presented. The very first version of the MEMS structure is actuated by consuming 11.5 mW and resulting displacement is measured to be 9 mm. Along with the LED die size of 250 mum times 250 mum, 36 pixels of resolution can be achieved.
Keywords :
LED displays; micromechanical devices; optical polymers; LED; MEMS; integrated miniaturized polymer; microelectromechanical systems; two-dimensional displays; Actuators; Energy consumption; Flat panel displays; Light emitting diodes; Light sources; Micromechanical devices; Optical arrays; Organic light emitting diodes; Transmission line matrix methods; Two dimensional displays;
Conference_Titel :
Research in Microelectronics and Electronics, 2008. PRIME 2008. Ph.D.
Conference_Location :
Istanbul
Print_ISBN :
978-1-4244-1983-8
Electronic_ISBN :
978-1-4244-1984-5
DOI :
10.1109/RME.2008.4595733