Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection

Author

Caboni, Alessandra ; Barbaro, Massimo ; Homsy, Alexandra ; Van der Wal, Peter ; Linder, Vincent ; de Rooij, Nico

Author_Institution

Dept. of Electr. & Electron. Eng., Univ. of Cagliari, Cagliari

fYear

2008

fDate

June 22 2008-April 25 2008

Firstpage

121

Lastpage

124

Abstract

This paper describes the fabrication technique for the realization a microfluidic flow cell to be integrated on a CMOS biosensor for DNA hybridization detection. The main element of the microfluidic system is made in polydimethylsiloxane (PDMS) elastomer and takes up an area of 5 mm². PDMS is cast against a silicon master patterned by deep reactive ion etching (DRIE) and then bonded on the chip by means of oxygen plasma activation. The micro channels patterned in the flow cell are connected with capillary tubes that can be easily interconnected to a common syringe.

Keywords

CMOS integrated circuits; DNA; biological techniques; elastomers; microchannel flow; molecular biophysics; plasma materials processing; sputter etching; CMOS biosensor; DNA hybridization detection; capillary tubes; deep reactive ion etching; microchannels; microfluidic flow cell; oxygen plasma activation; polydimethylsiloxane elastomer; Biosensors; Circuit testing; DNA; Digital control; FETs; Microfluidics; Multiplexing; Plasma temperature; Sensor arrays; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Research in Microelectronics and Electronics, 2008. PRIME 2008. Ph.D.

Conference_Location

Istanbul

Print_ISBN

978-1-4244-1983-8

Electronic_ISBN

978-1-4244-1984-5

Type

conf

DOI

10.1109/RME.2008.4595740

Filename

4595740