Title :
Totally free-flexible membrane for low voltage MEMS metal contact switch
Author :
Segueni, Karim ; Le Garrec, Loic ; Rollier, Anne-Sophie ; Robin, Renaud ; Touati, Salim ; Kanciurzewski, Alexandre ; Buchaillot, Lionel ; Millet, Olivier
Author_Institution :
DelfMEMS SAS, Villeneuve d´´Ascq
Abstract :
This paper presents results concerning an electromechanical DC-contact shunt switch based on a patented totally free-flexible metal membrane combined with an associated low temperature surface micromachining fabrication process. The electrostatic actuation enables an average measured actuation voltage of 9.2V for a 5 mum out-of-plane membrane deflection. The switch exhibits low insertion loss (0.32 dB @ 10GHz) with good isolation (>30dB @ 10GHz).
Keywords :
electrical contacts; micromachining; microswitches; electromechanical DC-contact shunt switch; electrostatic actuation; low temperature surface micromachining fabrication process; low voltage MEMS; metal contact switch; totally free-flexible membrane; Biomembranes; Contacts; Electrostatic actuators; Electrostatic measurements; Fabrication; Low voltage; Micromachining; Micromechanical devices; Switches; Temperature;
Conference_Titel :
Microwave Integrated Circuit Conference, 2007. EuMIC 2007. European
Conference_Location :
Munich
Print_ISBN :
978-2-87487-002-6
DOI :
10.1109/EMICC.2007.4412722
