Abstract :
A variable-capacitance acceleration sensor manufactured using silicon microfabrication techniques is described. The sensor uses midplane flat-plate suspension, gas damping, and overrange stops. The sensor is assembled from three silicon wafers, using anodic bonds to inlays of borosilicate glass. Typical sensor properties are 7 pF of active capacitance, 3 pF of rare capacitance, a response of 0.2 pF/G, a resonance frequency of 3.4 kHz, and damping 0.7 critical. An accelerometer using this sensor offers improved sensitivity, bandwidth, and shock resistance
Keywords :
accelerometers; electric sensing devices; elemental semiconductors; silicon; 3 pF; 3.4 kHz; 7 pF; Si; active capacitance; anodic bonds; bandwidth; borosilicate glass; damping; gas damping; midplane flat-plate suspension; overrange stops; rare capacitance; resonance frequency; sensitivity; shock resistance; variable capacitance accelerometer; Acceleration; Accelerometers; Assembly; Capacitance; Damping; Gas detectors; Glass; Manufacturing; Sensor phenomena and characterization; Silicon;
