Title :
Composition control of Bi2Sr2Can-1CunOy superconducting thin films by rf magnetron sputtering method
Author :
Yamane, T. ; Kishida, S. ; Tanaka, H. ; Yoshikawa, H.
Author_Institution :
Tottori Univ.
Abstract :
We deposited Bi2Sr2Ca1Cu2 Oy (Bi-2212) superconducting thin films on MgO substrates with or without Al2O3 particles by the RF magnetron sputtering method. From the results, we found that optimum the distances between targets and substrates target-substrate distance, RF powers and substrate temperature for obtaining the Bi-2212 films on the MgO substrates were 5mm, 150W and 830degC, respectively. The Bi-2212 films were Bi-2212 single-phase and had the Tc of about 54K. The particle size and the distribution density of Al2 O3 were controlled by annealing temperature. The Bi-2212/Al2O3/MgO film showed Bi-2212 single-phase, whereas did not show zero-resistance
Keywords :
aluminium compounds; bismuth compounds; calcium compounds; magnesium compounds; sputter deposition; strontium compounds; superconducting thin films; 150 W; 830 C; Bi2Sr2CaCu2O8-Al 2O3-MgO; RF magnetron sputtering method; composition control; superconducting thin films; Annealing; Bismuth; Radio frequency; Size control; Sputtering; Strontium; Substrates; Superconducting magnets; Superconducting thin films; Temperature control;
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 2006. ISDEIV '06. International Symposium on
Conference_Location :
Matsue
Print_ISBN :
1-4244-0191-7
Electronic_ISBN :
1093-2941
DOI :
10.1109/DEIV.2006.357371
