Damping characteristics of a micromachined piezoelectric diaphragm-based pressure sensor for underwater applications

Author

Tan, C.W. ; Kottapalli, A.G.P. ; Wang, Z.H. ; Ji, X. ; Miao, J.M. ; Barbastathis, G. ; Triantafyllou, M.

Author_Institution

Center for Environ. Sensing & Modeling, SMART Centre, Singapore, Singapore

fYear

2011

fDate

5-9 June 2011

Firstpage

72

Lastpage

75

Abstract

This paper reports on the underwater damping characteristics of a micromachined piezoelectric pressure sensor packaged using liquid crystal polymer (LCP) and polydimethylsiloxane (PDMS). In water, its sensitivity is flat about 6 dB (ref. 1 V/Pa) from 20 to 400 Hz while its bandwidth is 1.2 kHz. In air, its sensitivity is about -33 dB (ref. 1 V/Pa) at low frequency and increases significantly after 4 kHz. The damped response in water can be attributed to the introduction of additional mass and damping elements to the sensor structure, which reduces the quality factor of the diaphragm. The larger sensitivity in water is due to higher pressure as a result of the denser water environment.

Keywords

damping; liquid crystal polymers; microsensors; piezoelectric transducers; pressure sensors; LCP; PDMS; bandwidth 1.2 kHz; damping characteristics; denser water environment; frequency 20 kHz to 400 kHz; frequency 4 kHz; liquid crystal polymer; micromachined piezoelectric diaphragm-based pressure sensor; polydimethylsiloxane; underwater application; Damping; Fabrication; Frequency response; Micromechanical devices; Resonant frequency; Sensitivity; Sonar equipment; LCP; Microfabrication; damping; piezoelectric sensor; underwater packaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969138

Filename

5969138