Design, fabrication, and application of GHz SAW devices

Author

Knauer, U. ; Machui, J. ; Ruppel, C.C.W.

Author_Institution

Corp. Res. & Dev., Siemens AG, Munich, Germany

Volume

3

fYear

1997

fDate

8-13 June 1997

Firstpage

1821

Abstract

To meet the increasing demand of high performance filters in GHz radio communication systems, we have improved design techniques and fabrication processes. Different types of filters in the range of 1 to 3 GHz, a 2.45 GHz resonator with 18 dB insertion attenuation and a quality factor of 1500, wideband delay lines at 2.45 GHz, with 400 MHz and 600 MHz bandwidth, identification tags at 2.45 GHz, and ladder type bandpass filters for PCS and WLAN applications at 1.9 GHz and 2.45 GHz, were developed and manufactured. It will be shown, that these devices with submicron linewidth transducers down to 0.3 /spl mu/m can be manufactured with tight process tolerances.

Keywords

Q-factor; UHF filters; band-pass filters; ladder filters; surface acoustic wave delay lines; surface acoustic wave resonator filters; 0.3 micron; 1 to 3 GHz; 400 MHz; 600 MHz; PCS; SAW devices; WLAN; design techniques; fabrication processes; high performance filters; insertion attenuation; ladder type bandpass filters; process tolerances; quality factor; radio communication systems; resonator; submicron linewidth transducers; wideband delay lines; Attenuation; Band pass filters; Bandwidth; Delay lines; Fabrication; Q factor; Radio communication; Resonator filters; Surface acoustic wave devices; Wideband;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1997., IEEE MTT-S International

Conference_Location

Denver, CO, USA

ISSN

0149-645X

Print_ISBN

0-7803-3814-6

Type

conf

DOI

10.1109/MWSYM.1997.596915

Filename

596915